METHOD FOR MEASURING POSITION AND INCLINATION, INCLINATION MEASURING METHOD AND ADJUSTMENT FOR POSITION AND INCLINATION OF CCD ELEMENT

摘要

PURPOSE: To provide a method for measuring the position and the inclination and the inclination measuring method of the parts mounted on a precision mechanical equipment such as CCD cameras and the method for adjusting the position and the inclination of a CCD element. ;CONSTITUTION: At first, an optical unit 10 casts four rays 1, 2, 3 and 4 into a CCD element 15a. Then, the CCD element 15a detects the incident positions of the four rays 1, 2, 3 and 4. Finally, the deviating amounts in the directions of ϕ, θ, X, ψ and Y are detected by performing the operation by using the results of the detection.;COPYRIGHT: (C)1996,JPO