Thin film magnetic hetsudo and its production manner

摘要

PURPOSE:To prevent deterioration in the characteristics of a magnetic gap layer by separating an upper core layer to a front end part and rear part and forming the front end part in succession to formation of the magnetic gap layer. CONSTITUTION:The front end part 5a of the upper core layer formed on the magnetic gap layer 3 and the rear part 11 of the upper core layer formed on an inter-layer insulating layer 10 insulating a conductor coil layer 9 are coupled, by which the upper core layer is formed. The magnetic gap layer 3 can, therefore, be protected by forming the front end part 5a of the upper core layer in an early stage after formation of the magnetic gap layer 3. The magnetic gap layer 3 is thus prevented from being damaged in the stage for forming the conductor coil layer 7, the inter-layer insulating layer 6, etc., and the deterioration in the performance and dimensional accuracy is prevented. The formation of the front end part of the upper core layer in the state of good flatness with high dimensional accuracy in the early state is thus permitted.