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Thin film magnetic hetsudo and its production manner

机译:薄膜磁鹤堂及其生产方式

摘要

PURPOSE:To increase the lifetime of a thin film magnetic head together with improvement of the reliability by forming a vertical side wall surface and a back wall surface following the gap zero level at a lower core front part and setting the height of the back wall surface at a level lower than the height of the side wall surface or forming the back wall surface as a gentle slop surface. CONSTITUTION:The projecting side surface 2a2 of a front (tip) part is patterned approximately vertical by an extent equivalent to the track width or up in the fixed depth. Thus the highly accurate control is possible with the track width. While the etching depth of a gap termination part (back wall surface) 2a4 is set at a level less than the depth of a gap forming part (both side surfaces) 2a. Otherwise the part 2a4 is patterned in a gentle taper form. Thus the core volume is increased and therefore the magnetic saturation phenomenon can be reduced. In particular, the cross sectional area is increased for a neck part (a place immediately following a position 2C showing the zero level of the gap depth) that gives the grave influence to the magnetic saturation. Thus the occurrence of the magnetic saturation can be avoided. As a result, the reliability is improved for the recording/reproducing characteristics.
机译:目的:通过在下部铁芯前部形成沿间隙零水平的垂直侧壁表面和后壁表面,并设置后壁表面的高度,从而提高薄膜磁头的使用寿命并提高可靠性。高度应低于侧壁表面的高度或将后壁表面形成为平缓的倾斜表面。组成:前(尖端)部分的突出侧面2a2大约垂直构图,其延伸程度等于轨道宽度或固定深度以上。因此,可以利用轨道宽度进行高精度的控制。间隙终止部(后壁面)2a4的蚀刻深度被设定为小于间隙形成部(两个侧面)2a的深度。否则,将部分2a4图案化为柔和的锥形。因此,铁芯体积增加,因此可以减少磁饱和现象。特别地,对于颈部的横截面面积增加了(紧接在位置2C之后的位置,该位置示出了间隙深度的零水平),这严重影响了磁饱和。因此可以避免磁饱和的发生。结果,提高了记录/再现特性的可靠性。

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