Counter wait die vibration-proof vibration removal device

摘要

PURPOSE: To lighten a burden in the gravitational direction of an actuator as well as to set a gravitational natural frequency in an optional manner. ;CONSTITUTION: This device is featured that each weight of a vibro-eliminating table 3 and a machine M is compensated by a counter weight 6, and it is provided with a control circuit which drives an actuator 1 with each signal out of vertical relative displacement sensor S1 and a horizontal acceleration sensor S2 of the table 3.;COPYRIGHT: (C)1994,JPO&Japio