XPS QUANTITATIVE ANALYSIS METHOD

摘要

PURPOSE: To make quantification of element composition possible with sure by finding peak magnitude by integrating principal peak where background is removed by straight line method and shake-up satellite peak, and then dividing it with magnitude factor, set for each atomic orbit, of elements constituting a sample. ;CONSTITUTION: Principal peak where background is removed by straight line method, or, principal peak and shake-up satellite peak, are integrated to find peak magnitude I_a of an element a and peak magnitude I_i of each constitutive element i (elements a, b, c...). Next, the magnitude I_a and I_i are divided with sensitivity factor S_a (element a) and S_i (element i) corrected with magnitude factor α_a (element a) and α_i (element i), set for each atomic orbit, of elements constituting a sample, and, composition C_a of the element a is found from a formula. Thus, the peak magnitude of a tail part is included in the magnitude I_a and I_i, so, comparison and correction of analysis value for a standard sample become unnecessary.;COPYRIGHT: (C)1996,JPO