METHOD FOR REDUCING AMOUNT OF HYDROGEN ADSORBED TO DIAMOND SURFACE

摘要

PURPOSE: To decrease the amount of hydrogen adsorbed to the surface of a semiconductor diamond before electrical connection while preventing the generation of oxidation on the diamond surface. ;CONSTITUTION: The amount of adsorbed hydrogen on the surface of a semiconductor diamond substrate is reduced by radiating electron rays 9 from an electron gun 8 to the semiconductor diamond substrate surface before electrical connection and exciting the surface of the semiconductor diamond substrate 2 while preventing the oxidation of the substrate.;COPYRIGHT: (C)1995,JPO