首页> 外国专利> TREATMENT METHOD FOR HIGHLY PRECISE ANALYSIS OF IMPURITY IN SILICEOUS ANALYSIS SAMPLE AND APPARATUS THEREFOR

TREATMENT METHOD FOR HIGHLY PRECISE ANALYSIS OF IMPURITY IN SILICEOUS ANALYSIS SAMPLE AND APPARATUS THEREFOR

机译:硅质分析样品及其装置中杂质的高精度分析方法

摘要

PURPOSE:To analyze an impurity in a siliceous sample within a short time with high precision by separately storing an analysis sample container in which a siliceous analysis sample is mounted and a sample for sample decomposition in a closed container and then heating the container to decompose and sublimate the siliceous analysis sample and recovering the remaining in the analysis sample container. CONSTITUTION:A storage container cover body 2 and a storage container lower part 3 of which one ends are closed respectively and of which the other open ends are so formed as to be fitted mutually are fixed mutually with screws to close the inside of a storage container 1 in pressured state. Steps 5 are formed in the circumference of the lower part 3 and a plurality of analysis sample mounting containers 6 are arranged circularly in the cut part C, a siliceous analysis sample 9 is set in respective containers 6, and pollutants are prevented from being mixed in. Moreover, in the bottom of the lower part 3, a solution 8 for sample decomposition, for example a HF-HNO3 solution, is stored. In the case the container 1 is heated under the condition, the solution 8 is evaporated, causes convection current in the inside space S, sublimates the siliceous components in the sample 9, and dissolves the components in the solution. After that, impurities remaining in the containers 6 are recovered and analyzed.
机译:用途:通过在密闭容器中分别存放装有硅质分析样品的分析样品容器和用于样品分解的样品,然后在短时间内高精度地分析硅质样品中的杂质,然后加热容器使其分解并将硅质分析样品升华,并回收分析样品容器中的残留物。组成:一个储物箱盖体2和一个储物箱下部3,其一端分别是封闭的,而另一个开口端形成为可以相互配合,并用螺钉相互固定,以封闭储物箱的内部1在受压状态。在下部3的周围形成台阶5,在切口部C上圆形地配置有多个分析试样载置容器6,在各容器6内载有硅质的分析试样9,防止了污染物混入。此外,在下部3的底部,存储有用于试样分解的溶液8,例如HF-HNO 3溶液。在该条件下加热容器1的情况下,溶液8蒸发,在内部空间S中产生对流,升华样品9中的硅质成分,并将成分溶解在溶液中。之后,回收并分析残留在容器6中的杂质。

著录项

  • 公开/公告号JPH07333121A

    专利类型

  • 公开/公告日1995-12-22

    原文格式PDF

  • 申请/专利权人 TOSHIBA CERAMICS CO LTD;

    申请/专利号JP19940152871

  • 发明设计人 SHIMANUKI KAZUHIKO;TOKUTAKE FUMIO;

    申请日1994-06-10

  • 分类号G01N1/28;G01N1/36;H01L21/66;

  • 国家 JP

  • 入库时间 2022-08-22 03:55:40

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