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METHOD FOR PRODUCING DIAMOND LAYERS BY MEANS OF MICROWAVE PLASMA SUPPORTED CVD.
METHOD FOR PRODUCING DIAMOND LAYERS BY MEANS OF MICROWAVE PLASMA SUPPORTED CVD.
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机译:用微波等离子体支持的CVD方法生产金刚石层的方法。
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摘要
The invention relates to a method for diamond coating of a large number of discrete components by Microwave Plasma Assisted CVD equipped with a bowl shaped substrate table. Its geometrical shape and configuration results in a more stable plasma, the shape and position of which conform well with the individual components. This reactor geometry also enhances the flow of the excited gas mixtures and therefore a large number of discrete components can be coated simultaneously even at high microwave power. IMAGE
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