Internal stress control method of diamond film

摘要

The present invention relates to a method for controlling the internal stress of a diamond thin film, and more particularly, to precisely solve a problem caused by stress in manufacturing an application using diamond by pretreating the substrate on which the diamond thin film is to be deposited and heat-treating it in a non-oxidizing atmosphere. Diagnosing the internal stress of the diamond film can provide the advantages of not only making heat sinks easy to diagnose, but also providing the advantages of precisely manufacturing masks for semiconductor devices and X-ray photographs, in which product degradation occurs due to small stresses. It is about a method.