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Mass synthesis device and synthesis method of coating layer for circular substrate using high frequency plasma chemical vapor deposition method
Mass synthesis device and synthesis method of coating layer for circular substrate using high frequency plasma chemical vapor deposition method
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机译:使用高频等离子体化学气相沉积法的圆形基板的涂层的质量合成装置和合成方法
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摘要
A diamond-like hard carbon film having a circular shape capable of coating a large capacity drum at one time by arranging a pair of a power supply electrode and a ground electrode connected to independent power sources and installing them in a plurality of vacuum reactors is coated by a high frequency plasma chemical vapor deposition Device. /RTI
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