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Ceramic vapor deposition vessel improved in strength and electrical properties and method of manufacturing the same
Ceramic vapor deposition vessel improved in strength and electrical properties and method of manufacturing the same
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机译：强度和电性能提高的陶瓷气相沉积容器及其制造方法
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摘要
The present invention relates to a TiB2-BN-AlN based ceramics vapor deposition vessel and a method of manufacturing the same.;wTlB2-xBN-yAlN-zWC;0.60 W 0.70, 0.15 X 0.20, 0.08 Y 0.17, and 0.03 Z 0.15, but w + x + y = z = 1.
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机译：基于TiB 2 -BN-AlN的陶瓷气相沉积容器及其制造方法。wTlB 2 -xBN-yAlN-zWC; 0.60 W 0.70、0.15 X 0.20、0.08 Y 0.17和0.03 Z 0.15，但w + x + y = z = 1。
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