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CERAMIC DEPOSITING VESSEL HAVING IMPROVED STRENGTH AND ELECTRICAL PHYSICAL PROPERTYFOR ITS PRODUCTION
CERAMIC DEPOSITING VESSEL HAVING IMPROVED STRENGTH AND ELECTRICAL PHYSICAL PROPERTYFOR ITS PRODUCTION
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机译:陶瓷沉积容器的生产强度和电气物理性能得到改善
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摘要
The invention provides a TiB2-BN-AIN type ceramics deposited vessel. Its formula is wTiB2-xBN-yAIN-zWC in which w, x, y and z are 0.6 to 0.7, 0.15 to 0.20, 0.08 to 0.17 and 0.03 to 0.15 (w+x+y+z=1). The characteristics of process for producing the vessel are mixing TiB2-BN-AIN type ceramics material with WC, a sintering additive and sintering the mixture at a temperature of 1800-1950 C under a pressure in nitrogen atmosphere
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机译:本发明提供了TiB2-BN-AIN型陶瓷沉积容器。其公式为wTiB2-xBN-yAIN-zWC,其中w,x,y和z为0.6到0.7、0.15到0.20、0.08到0.17和0.03到0.15(w + x + y + z = 1)。该容器的制造方法的特征是将TiB2-BN-AIN型陶瓷材料与WC,烧结助剂混合,并在氮气氛下于1800〜1950℃的温度下进行烧结。
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