Supporting member for an automatic loading tray of an exposure unit for a silicon wafer (an automatic loading tray for an exposure unit for silicon wafers)

摘要

The support member proposed for the automatic loading tray 10 of the exposure unit for a silicon wafer is suitable for guiding the loading station and has a circular cross section with an outer diameter smaller than the diameter of the silicon wafer, (16) has an at least partially expanded portion (17) circumferentially parallel to the transport direction of the loading station, and thus a second outer diameter approximately corresponding to the outer diameter of the silicon wafer (12). The maximum width of the support member 11 coincides with the width of the circular disk 16 at right angles to the transport direction.