首页>
外国专利>
DEVICE FOR COATING SUBSTRATES IN SEMICONDUCTOR MANUFACTURE FOR COATING SUBSTRATES IN SEMICONDUCTOR PRODUCTION
DEVICE FOR COATING SUBSTRATES IN SEMICONDUCTOR MANUFACTURE FOR COATING SUBSTRATES IN SEMICONDUCTOR PRODUCTION
展开▼
机译:用于在半导体生产中涂覆基底的设备,用于在半导体生产中涂覆基底
展开▼
页面导航
摘要
著录项
相似文献
摘要
In an apparatus for lacquering organs, in a first step lacquers are provided to the substrate 20 by capillary slots 20, and the lacquer layer thickness provided in the second step is reduced and more uniform by the spinning process.
展开▼