A method for scanning a sample surface, in particular with scanning probe microscopes

摘要

A process is disclosed for scanning a sample surface, in particular by means of the scanning probe of a scanning force microscope, in which the scanning point and the sample are moved with respect to each other. The scanning point is guided in a predetermined pattern over the surface of the sample to be scanned. According to the invention, the scanning point moves in curves instead of reversing its direction of movement as in known processes. Consequently, acceleration effects and thus measurement disturbances are reduced. The greater the radius of the curves, the less are the measurement disturbances. The curve diameter is advantageously a multiple of the distance between two adjacent points of the scanning pattern.