Dual purpose cleaning tray for lot box cleaning machine

摘要

In order to clean reticle boxes in the same manner as lot boxes and the like type of container, the framework of a basket which is used to support containers such as the lot boxes, is modified in a manner which allows reticle boxes to be additionally disposed therein. This modified basket allows both types of boxes to be cleaned at the same time by a specialized cleaning machine which makes use of distilled de-ionized water, surfactant, clean air and the like type of fluids, for washing and drying purposes.