Tray for box cleaning apparatus and box cleaning apparatus including the same

摘要

The tray for the box cleaning apparatus of this embodiment includes a rotating shaft for rotating the cover of the box for carrying wafers; first and second gripping wheels provided to be axially spaced apart from the rotation shaft and rotated along with the rotation shaft; and a bearing means provided between the first and second gripping wheels and rotatably supporting the rotary shaft, wherein the bearing means includes: at least one bearing surrounding the rotary shaft; and at least one supporter for axially supporting between the two gripping wheels.