首页>
外国专利>
Method of making hard, transparent amorphous hydrogenated boron nitride films
Method of making hard, transparent amorphous hydrogenated boron nitride films
展开▼
机译:制备坚硬,透明的非晶态氢化氮化硼薄膜的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
This invention is directed to a process for providing a hard, transparent, hydrophobic film of hydrogenated boron nitride on a substrate and the film so made. The process comprises depositing the film condensation from a flux of ions generated from gaseous precursors comprising borazine, the kinetic energy of the ions being between 50 and 300 electron volts per ion. Preferably the process is plasma-enhanced chemical vapor deposition carried out in a radio frequency plasma system.
展开▼