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Piezoresistive accelerometer with enhanced performance
Piezoresistive accelerometer with enhanced performance
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机译:具有增强性能的压阻式加速度计
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摘要
An electromechanical transducer is provided, and the process for making it utilizes a piezoresistive element or gage which is dielectrically isolated from a gap spanning member and substrate upon which it is supported. The gage of the invention is a force gage and is derived from a sacrificial wafer by a series of etching and bonding steps which ultimately provide a gage with substantially reduced strain energy requirements.
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