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Apparatus and methods employing harmonic analysis for measuring the difference in phase between two coherent beams
Apparatus and methods employing harmonic analysis for measuring the difference in phase between two coherent beams
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机译:使用谐波分析测量两个相干光束之间的相位差的设备和方法
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摘要
An improved interferometric measuring system that includes a system for measuring a phase difference between two coherent beams oscillating at substantially the same frequency, and including a phase modulator disposed into optical communication with one of the coherent beams and being adapted to generate a phase modulated beam signal. A beam combiner combines the phase modulated beam signal with the second one of the coherent beams to generate a combined beam signal. A detector element measures the intensity of the combined beam signal and a date processor analyzes the intensity to determine from the harmonic components of the combined beam signal the phase difference between the two coherent beams.
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