MICROTIP FOR DETECTION OF TUNNEL CURRENT AND ITS MANUFACTURE, AND PROBE FOR DETECTION OF TUNNEL CURRENT OR MICROFORCE AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To obtain a uniform shape of good reproducibility and form a sharp front end by supporting a front end part of a microtip formed of a metallic material by a plurality of leg parts joining a bonding layer. ;SOLUTION: A recessed part is formed at a surface of a first silicon substrate 1. A microtip 5 of a highly conductive metallic material is formed on a release layer formed of an oxide on the substrate 1 including the recessed part. A bonding layer 7 is formed on an elastic body such as a cantilever or the like on a second substrate. The microtip 5 on the substrate 1 is registered with the bonding layer 7 on the second substrate, and faced into touch with each other. Further, a load is impressed, thereby to join the microtip 5 with the bonding layer 7. A tunnel current wiring 10 is connected to the bonding layer 7.;COPYRIGHT: (C)1997,JPO