MICROPROBE USED FOR TUNNEL CURRENT DETECTION OR MICROFORCE DETECTION AND PROBE HAVING THE MICROPROBE AND SCANNING TYPE PROBE MICROSCOPE PROVIDED WITH THE PROBE AND PRODUCTION OF THE MICROPROBE OR THE PROBE AND FEMALE MOLD BOARD FOR FORMATION OF THE MICROPROBE AND MANUFACTURE OF FEMALE MOLD BOARD

摘要

PROBLEM TO BE SOLVED: To form a microprobe without removing by etching the female mold of the microprobe in the later process and reuse the female mold by making higher one peak of the microprobe used for a scanning tunnel microscope and the like than the other peak. ;SOLUTION: The scanning probe microscope is constituted by providing a probe having a microprobe 10 which has two peaks one of which is higher than the other. A recess part is formed on the surface of the first board 1. On the board 1 including the recess part 3, a separation layer 5 and a contact layer 6 are provided. Then, on the board 1 including the recess part 3, a probe material layer 7 is coated. Then, an interface layer 8 is formed on the second board 9. Next, the material layer 7 on the separation layer 5 including the recess part 3 is bonded on the interface layer 8. separation is performed at the boundary between the separation layer 5 and the material layer 7 and the material layer 7 is transferred on the interface layer 8.;COPYRIGHT: (C)1997,JPO