OXIDE THIN FILM STRUCTURE, MANUFACTURE OF THIN FILM, AND PIEZOELECTRIC SENSOR-ACTUATOR

摘要

PROBLEM TO BE SOLVED: To enable an oxide thin film to be stably formed even on a thermolabile substrate by a method wherein a platinum layer is deposited on an organic material, an oxide thin film is formed thereon so as to be a structure easily applicable to a piezoelectric device or the like, and an ultraviolet laser is employed. SOLUTION: An ultraviolet laser ray irradiation mechanism of an excimer laser is jointly provided to an ion beam sputtering mechanism, and pulse laser rays of about 100mJ/cm2 and p.r.f 10Hz are made to irradiate a thin film on deposition. A piezoelectric PbTiO3 thin film 6 of 3μm in thickness is formed as a piezoelectric oxide thin film on a polyimide film 8 which is about 50μm in thickness and where a platinum layer 9 of 0.1μm in thickness is provided. The thin film 6 is formed in an atmosphere of room temperatures as irradiated with ultraviolet rays by an excimer laser where XeCl gas is used while it is deposited. The excimer laser irradiates ultraviolet rays of wavelength 308nm and p.r.f 10Hz.