COMPOSITE SENSOR FOR DETECTION OF ANGULAR VELOCITY AND ACCELERATION, AND MOVEMENT STATE DETECTION METHOD FOR DETECTION OF ANGULAR VELOCITY AND ACCELERATION

摘要

PROBLEM TO BE SOLVED: To provide a composite sensor by which both angular velocity and acceleration can be detected. SOLUTION: Two sets of pairs of plate electrodes which are made parallel by keeping a prescribed interval are arranged on a moving body so as to form a prescribed angle mutually. One each of platelike intermediate electrodes 15a, 15b are inserted in parallel between the plate electrodes 141 and 143 , and between the plate electrodes 142 and 144 . The two intermediate electrodes 15a, 15b are vibrated, four vibration capacitance-type capacitors are formed, and a composite sensor 2 which detects the capacitance value of every vibration capacitance-type capacitor and which finds the angular velocity and the acceleration of the moving body is constituted. The angular velocity and the acceleration can be detected by one sensor, and it is possible to obtain the composite sensor which is not affected by temperature change and whose shock resistance is excellent.