FAULT COUNTERMEASURE SYSTEM FOR SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PURPOSE: To provide a semiconductor manufacturing device with high reliability and high production efficiency by continuing substrate processing even when an integrated controller has a fault. ;CONSTITUTION: A standby system integrated controller GC-R is provided in addition to an active system controller GC operated usually, a message is exchanged between the total controllers GC, GC-R to exchange information or the like with respect to an operating schedule of each module and the state of the standby system integrated controller GC-R is kept the same as a control state of the active system integrated controller GC. When the active system integrated controller GC has a fault, the standby system integrated controller GC-R manages and controls sub-controllers PC1-PC8, CC1, CC2, TC1, TC2 in place of the active system integrated controller GC.;COPYRIGHT: (C)1997,JPO