VACUUM PUMPING EQUIPMENT, SEMICONDUCTOR MANUFACTURING EQUIPMENT, AND VACUUM PROCESSING METHOD

摘要

PURPOSE: To provide a vacuum pumping equipment, a semiconductor manufacturing equipment, and a method for vacuum processing, by which high-performance semiconductor devices can be manufactured stably and with a high yield. ;CONSTITUTION: A vacuum pumping equipment consists of a turbo-molecular pump 103 and an auxiliary pump 105 which is connected to the exhaust side of the turbo-molecular pump. An entranced 114 for supplying specified gas is installed between a turbo-molecular pump 103 and the auxiliary pump 105. Thus, a vacuum chamber 101 is evacuated while it is charged with the specified gas through the gas entrance 114.;COPYRIGHT: (C)1996,JPO