Sample production manner for analysis of semiconductor equipment and symbolic attaching device null of sample for analysis

摘要

PURPOSE:To easily specify the cause of a malfunction by applying laser light to a semiconductor, forming a symbol near an improper element on the device, and then analyzing the improper element of the device. CONSTITUTION:A convergent lens 2 and a slit 6 are so used as to freely set the diameter of a laser beam to match the manufacturing rule of a semiconductor device 5 and the size of a symbol. Further, laser power, a position controller 8, a convergent lens system controller 9, drive controller 10 are controlled by a data input unit 11, a semiconductor material, a position of the symbol, the size of the symbol, etc., are input to perform a role of a terminal to control laser energy, the diameter of the laser, a drive system, etc. This system is used to analyze a malfunction by using a 1 megabit DRAM transmission electron microscope and to simultaneously set its analyzing time to the same as the sample manufacturing time of the microscope.