PROBE FOR ATOMIC FORCE MICROSCOPE, METHOD OF FABRICATING SAME, AND ATOMIC FORCE MICROSCOPE

摘要

An AFM (atomic force microscope) probe having a sharpenedprobe tip is fabricated by a simple fabrication method.A probe whose tip is formed by crystal planes of apiezoelectric crystal substrate is offered. Also, a probewhose tip is formed by an isotropic method is proposed.Furthermore, methods of fabricating these probes are offered.Moreover, scanning atomic force microscopes are constructed,using these probes.