Vertical structured optical modulator using dual wavelength DBR

摘要

The present invention relates to an optical device capable of integrating two different wavelength devices to play a role of logic, switching, wavelength conversion, etc., and is transparent to the substrate 1 on a semiconductor substrate 1 doped with a first conductivity type. An optical device operating at a wavelength having a first optical device structure in which the first conductive electrode 2, the multi-quantum well structure layer 3 of the optically active layer, and the second conductive electrode 4 are sequentially formed. And a mirror structure (5) having a high reflectance at the same time on the first optical element structure and the second wavelength cut out on the first optical element structure, and on the mirror structure (5) A second optical element structure in which the second conductive electrode 6 operating at the second wavelength, the multi-quantum well structure layer 7 of the optically active layer, and the second conductive semiconductor electrode layer 8 are sequentially formed; The first conductive base 1 and the second conductive electrode 6 An ohmic electrode 9, an ohmic electrode 10 for the second conductive electrode 4 and a second conductive semiconductor electrode layer 8, an antireflection film 11 for the second optical element structure, An anti-reflective film 12 for the first optical element structure is provided and has a vertical structure type using a dual wavelength DBR composed of a metal connecting the second conductive electrode 4 and the second conductive electrode 6. It relates to an optical modulator.