Manufacturing method of cobalt / platinum magneto-optical multilayer thin film

摘要

The present invention relates to a method for producing a Co / Pt magneto-optical multilayer thin film using a vacuum deposition method, and to produce a Co / Pt magneto-optical multilayer thin film using a vacuum deposition method, and then heat treatment in a nitrogen gas atmosphere to provide a uniform interface and thermal stability. An object of the present invention is to provide a method for manufacturing a Co / Pt magneto-optical multilayer thin film.;The present invention for achieving the above object is a method for forming a Co / Pt magneto-optical multilayer thin film by repeatedly depositing a Pt buffer layer on a substrate using a vacuum deposition method, and then repeating the Co / Pt unit two layers, the Pt buffer layer The Co / Pt unit two layers having a thickness of 3-4 kPa and 10-15 kPa, respectively, were repeatedly deposited at least 10 times at a deposition rate of 0.2-0.3 kPa / sec per layer, and then heat-treated at a temperature of 200 ° C. or lower in an inert atmosphere. The present invention relates to a method for producing a cobalt / platinum magneto-optical multilayer thin film comprising the above.