Manufacturing method of cobalt / paradium magneto-optical multilayer thin film by vacuum deposition method

摘要

The present invention relates to a method for manufacturing a Co / Pd magneto-optical multilayer thin film used as an optical recorder recording medium, wherein a Pd buffer layer is formed on an indium oxide bottom layer using a vacuum deposition method when forming a magneto-optical multilayer thin film on a substrate. An object of the present invention is to provide a method for producing a Co / Pd magneto-optical multilayer thin film having a high coercive force characteristic and an excellent vertical magnetic hysteresis angular ratio without sputter cleaning by depositing a / Pd multilayer thin film.;In order to achieve the above object, the present invention provides a method for forming a Co / Pd magneto-optical multilayer thin film on a substrate, wherein the substrate is placed in a vacuum chamber, charged with indium oxide in an evaporation source, and then evaporated to oxidize the substrate. Depositing an indium bottom layer: removing the indium oxide by loading a vacuum chamber and charging evaporation sources Co and Pd, respectively, and evaporating Pd to deposit a Pd buffer layer on the indium oxide bottom layer: and Co and Pd on the Pd buffer layer The present invention relates to a method for producing a Co / Pd magneto-optical multilayer thin film using a vacuum deposition method comprising cross-evaporating and depositing a Co / Pd magneto-optical multilayer thin film.