Contact inspection device for checking the contact failure of the processor and integrated circuit device inspection system incorporating the same

摘要

The present invention can quickly diagnose the cause of defects when a defect in contact between a fin of a processor and a terminal of an integrated circuit element, in particular, a high frequency element, occurs in the course of inspecting an integrated circuit element, A) an inspection device for inspecting the electrical characteristics of the integrated circuit device; B) a semiconductor device having a pin directly in contact with the terminal of the integrated circuit device, the inspection device and the integrated circuit device A contact inspection board on which a circuit for checking the contact state between the processor pins and the terminals of the integrated circuit elements is formed; And a package integrated circuit for checking the contact state is provided. Wherein a touch inspection device is provided between the inspection equipment and the process.