Ultra-thin silicon wear-resistant coatings for slider and thin-film magnetic heads on air bearing surfaces

摘要

A single layer abrasion resistant coating was provided for the magnetic head assembly. The single layer is a silicon or silicon based material having a thickness in the range of 30-75A. The single layer was formed by a single deposition step using a DC magnetron. A single layer abrasion resistant coating enhances the wear resistance of the magnetic head assembly and protects one or more sensitive elements of the magnetic head without significantly increasing the space loss.