Method and device for optical detection of a to - or incorporation of at least one material species in or on at least one thin layer

摘要

The interference produced by the radiation process are measured. The interference is measured at the reflected part beams. The light is irradiated vertically to the surface of the thin layer. White light esp. light of a xenon high pressure lamp is irradiated. Measurement values received as alterations of the optical layer thickness of the thin layer are interpreted and in certain cases are reproduced. ADVANTAGE - Physical, chemical, biochemical and biological processes are detected in simplest possible manner.