ionenimplanter and procedures to implant an ion beam, in implantation

摘要

An ion implanter (56) consists of: a) an oscillator (58) for providing a fixed frequency y-signal; b) a modulator (54) for providing a variable x-signal; c) a scan amplifier (60) adapted for buffering and phase-modulating the y signal into two y scan signals of opposing phase, and for buffering and phase-modulating the x signal into two x scan signals of opposing phase; and d) a pair of x-deflectors (62a,62b) connected to receive x-scan signals and a pair of y-deflectors (62c,62d) connected to receive y-scan signals. More specifically, an ion implanter as above wherein the modulator comprises: e) first and second waveform generators (64,66) connected in series; and f) input and output to second waveform generator, wherein the input receives a triangular wave of fixed frequency and the output produces the x-signal having a frequency which varies in direct proportion to the voltage of the triangular wave. Thus frequency-modulated movement of the ion-beam across the wafer is achieved. Also claimed is a method for ion-implanting a wafer using the appts. cited above.