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CCD solid state image device which has a semiconductor substrate with a P- type region with an N-type region formed therein by injection of arsenic

机译:CCD固态图像器件,其具有通过注入砷而在其中形成有N型区域的P型区域的半导体基板

摘要

In a CCD solid state image sensing device in which a photosensitive section is constructed by a photodiode formed by a PN junction between a first P-type well region and an N-type impurity diffusion region formed on an N-type silicon substrate, the N-type impurity diffusion region is formed by the ion implantation of single substance of arsenic (As). According to this CCD solid state image sensing device, a bright flaw on an image sensing screen, which is one of the defects encountered with an image sensing screen, can be reduced. Also, the n-type impurity diffusion region constructing the PN Junction can be reduced in size and the CCD solid state image sensing device itself can be made compact in size. Further, a method of manufacturing a CCD solid state image sensing device also is provided.
机译:在其中通过由在第一P型阱区和在N型硅衬底上形成的N型杂质扩散区之间的PN结形成的光电二极管构成感光部的CCD固态图像感测装置中,N砷(As)单一物质的离子注入形成了类型的杂质扩散区。根据该CCD固态图像感测装置,可以减少作为图像感测屏遇到的缺陷之一的图像感测屏上的亮缺陷。而且,可以减小构成PN结的n型杂质扩散区域的尺寸,并且可以使CCD固态图像感测装置本身的尺寸紧凑。此外,还提供了制造CCD固态图像感测装置的方法。

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