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Precision radome made using conformal photolithography to pattern curved surfaces

机译:使用共形光刻技术制作的精密天线罩可对曲面进行图案化

摘要

A conformal mask permits the manufacture of precision frequency selective surfaces (FSS) that have patterns on complexly curved surfaces. These FSSs are used in precision radomes. The mask has a transparent substrate and a patterned opaque layer on the substrate. The layer may be patterned by laser ablation. Alternatively, the patterning of the opaque layer can be accomplished by applying a layer of photosensitive material over the opaque layer and then defining temporary and permanent areas thereof. The temporary areas of the photosensitive layer and the opaque layer are removed sequentially to define the transparent portions of the mask. Parts are made by intimately mating the mask and a part body to which a layer of metal and a layer of photosensitive material have been applied, and exposing the part to radiation through the mask. The exposed part is then chemically developed, the layer of metal is etched, and the remainder of the layer of photosensitive material is removed to complete the patterning of the part body surface. The mask is preferably made using a high precision laser etch system to sharply define the transparent portions of the mask and maximize the precision of the patterning on the subsequently made parts.
机译:保形掩模允许制造在复杂曲面上具有图案的精密频率选择表面(FSS)。这些FSS用于精密天线罩。掩模具有透明基板和在基板上的图案化不透明层。该层可以通过激光烧蚀图案化。可替代地,不透明层的图案化可以通过在不透明层上施加光敏材料层然后限定其临时和永久区域来实现。依次去除光敏层和不透明层的临时区域,以限定掩模的透明部分。零件的制造是通过使掩模与已应用金属层和光敏材料层的零件本体紧密配合,并使零件经受通过掩模的辐射而实现的。然后对裸露的零件进行化学显影,对金属层进行蚀刻,然后除去光敏材料层的其余部分,以完成零件主体表面的构图。掩模优选地使用高精度激光蚀刻系统来制造,以清晰地限定掩模的透明部分并使在随后制造的部件上的图案化的精度最大化。

著录项

  • 公开/公告号US5633105A

    专利类型

  • 公开/公告日1997-05-27

    原文格式PDF

  • 申请/专利权人 THE BOEING COMPANY;

    申请/专利号US19950464232

  • 发明设计人 DAVID G. JENSEN;DANIEL R. TICHENOR;

    申请日1995-06-05

  • 分类号G03C3/00;

  • 国家 US

  • 入库时间 2022-08-22 03:10:02

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