FORMATION OF MICRO TUNNEL JOINT AND MICRO TUNNEL JOINT ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for forming micro tunnel joints with extremely high dimensional accuracy and a micro tunnel joint element having such a structure to facilitate integration. ;SOLUTION: Thin films of different kinds are grown and laminated laterally in the inplane direction of a substrate, so as to form micro tunnel joints 13 and 14. The lateral growth of thin film in crystal plane direction can be performed by introducing a step 11 having specified orientation and height on the crystal plane by means of step bunching, etc., and selectively growing an atomic layer on the crystal plane of the step.;COPYRIGHT: (C)1998,JPO