ANODIC CHEMICAL CONVERSION TREATMENT OF FILM SUBSTRATE AND SEMICONDUCTOR THIN-FILM HAVING PHOTOLUMINESCENCE CHARACTERISTIC

摘要

PROBLEM TO BE SOLVED: To obtain a functional element such as a light-emitting element, a cold cathode source, and a solar cell thin-film, etc., having stable characteristics by terminating the substrate surface with heavy hydrogen. ;SOLUTION: A thin-film substrate is immersed as an anode in the heavy hydrogen fluoride (DF) solution, and a thin-film substrate is made porous. As the thin-film substrate, a single-crystal Si, a single-crystal Ge, diamond, SiC, poly Si, a micro-crystal Si, amorphous Si, etc., are used. The heavy hydrogen fluoride (DF) solution, preferably has the composition of DF:H₂O=1:(10-200). Thus, the thin-film substrate treated with the heavy hydrogen fluoride (DF) solution has a porous structure, wherein the hole part wall is terminated with heavy hydrogen (D) and exhibits a stable photoluminescence characteristic.;COPYRIGHT: (C)1998,JPO