Thin-film processing system useful for chemical bath deposition on solar cell substrates for treatment of substrates, comprises solution delivery unit, unit for chemical bath deposition, and solution outflow

摘要

Thin-film processing system for chemical bath deposition on solar cell substrates for treatment of substrates, which has a disuse zone and a processing zone and forms a closure structure, comprises (i) a solution delivery unit for introducing a solution in the closure structure, which is to be transported, (ii) a unit for chemical bath deposition, which is arranged downstream to the solution delivery unit and receives the closure structure, which is transported by the solution delivery unit, and (iii) a solution outflow, which is arranged downstream to the unit for chemical bath deposition. Thin-film processing system for chemical bath deposition on solar cell substrates for treatment of substrates, which has a disuse zone and a processing zone and forms a closure structure, comprises (i) a solution delivery unit for introducing a solution in the closure structure, which is to be transported so that the processing zone of the substrate is completely covered by the solution, (ii) a unit for chemical bath deposition, which is arranged downstream to the solution delivery unit and receives the closure structure, which is transported by the solution delivery unit, and (iii) a solution outflow, which is arranged downstream to the unit for chemical bath deposition. The disuse zone is an edge surface of the substrate, on which the deposition process has no effect. The processing zone is the surface, which is not covered by the disuse zone. The substrate comprises a hermetic contact with a solution covering during chemical bath deposition and forms the closure structure comprising a closure space together with the solution covering. The solution and a thin film are present in the closure space during deposition. The chemical bath deposition is carried out during the transport of the closure structure, and the closure structure is further transported, after the formation of the thin film. The solution outflow receives the closure structure from the unit for chemical bath deposition, and decants the solution present in the closure structure. An independent claim is also included for thin film processing method for the chemical bath deposition on solar cell substrates using processing system comprising introducing the solution into the closed structure so that the processing zone of the substrate is complexly covered by the solution, and decanting the solution from the closure structure after bath deposition process.