METHOD FOR GROWING ZNS:MN PHOSPHOR LAYER FOR THIN FILM ELECTRO-LUMINESCENCE ELEMENT

摘要

PROBLEM TO BE SOLVED: To improve performance of a ZnS:Mn thin film due to an atom layer epitaxy method by using an organic zinc compound and a hydrogen sulfide or an organic sulfur compound and an organic Mn compound or an organic Mn complex compound as a precursor substance. ;SOLUTION: An electro-luminescence ZnS:Mn structure obtained has following advantages. First, a driving voltage symmetrical luminescence property that is extremely important in control of a gray scale display unit is imparted. A degree of degradation of brightness of the display unit is decreased, and brightness degradation of individual pixels while in extended use decreases. Therefore, a degree of pattern discoloration becomes much more small. An organic precursor substance is used, thus making it possible to clearly keep a substrate temperature not greater than a softening point of a soda lime glass, and damage due to warping of the glass substrate is prevented. Further, an organic zinc compound is a liquid at room temperature, and due to its high vapor pressure the compound can be directly supplied to a reactor by a panel valve without requiring a special device.;COPYRIGHT: (C)1998,JPO