ESTIMATION METHOD FOR YIELD OF INTEGRATED-CIRCUIT DEVICE

摘要

PROBLEM TO BE SOLVED: To estimate the prediction yield of an integrated-circuit device with high accuracy. ;SOLUTION: Required information on a chip area A, the number of elements, a defect density D and the like is input (ST 1), and an element density TD and an average element density TDM are computed (ST 2). A reverse chip area A' is computed by an estimation expression of Y=f(A) such as Stapper's expression or the like indicating the dependence characteristic of a yield on the defect density D and on the chip area A (ST 4). Then, regarding various integrated-circuit devices in a diffusion process, a function relationship g (TD /TDM) which is regarded most proper on the basis of relational data of a ratio (A'/A) to a ratio (TD/TDM) is decided (ST 4), and a correction factor K is computed on the basis of the relationship g (TD/TDM) (ST 6). Lastly, the value of the correction factor K and that of the chip area A are substituted into Y=f(A*K), and a prediction yield Y is computed (ST 7).;COPYRIGHT: (C)1998,JPO