FORMATION OF COMPOSITE HARD FILM EXCELLENT IN HIGH TEMPERATURE OXIDATION RESISTANCE BY ION PLATING

摘要

PROBLEM TO BE SOLVED: To obtain coating excellent in high temp. oxidation resistance by generating Al vapor and Cr vapor from a generating source of Al vapor and Cr vapor arranged in a vacuum chamber, simultaneously introducing gaseous nitrogen into the vacuum chamber and forming Al-Cr-N composite hard film on a substrate. ;SOLUTION: Al and Cr are melted in a crucible arranged in a vacuum chamber to generate Al vapor and Cr vapor. Otherwise, to a target of Al and Cr, sputtering or arc discharge is used to generate Al vapor and Cr vapor. The compsn. of metals in the crucible or that of the target is preferably composed of, by atom, 25 to 75% Al and 75 to 25% Cr. Gaseous nitrogen is introduced into the mixed vapor of Al and Cr to generate plasma and to form Al-Cr-N composite hard coating, on a substrate. Its heat resistance can be improved to the level of 1,000°C.;COPYRIGHT: (C)1998,JPO