MINUTE DIMENSION STANDARD STRUCTURE AND MINUTE DIMENSION-STANDARDIZING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a length reference relating to which a pattern itself can be a reference of length. ;SOLUTION: This standard structure contains a line & space structure which comprises the first group, the second group and the third group in the longitudinal direction of a line. The third group is placed between the first group and the second group, and widths of lines of the first group and the second group are equal to each other, and repetition periods of them are different from each other, and line width of the third group is, with a line next to the line whose width is zero as a starting point, gradually widened by the difference between the repeat periods of the first group and the second group.;COPYRIGHT: (C)1997,JPO