Production method of the minute three-dimensional structure due to FIB-CVD and the drawing system of the minute three-dimensional structure

摘要

Production method and its drawing system of the minute three-dimensional structure due to FIB-CVD which can produce 3 dimensional minute three-dimensional structure and the structure which is not the supporting section of especially terrace structure and hollow structure etc are offered. Lighting position of the beam, irradiation time is decided on the basis of the discrete drawing data of the lamination structure which calculated the cross section which from 3 dimensional model of the minute three-dimensional structure which is designed making use of the computer is divided into height direction, the minute three-dimensional structure is produced by controlling the focus ion beam.