ELECTRONIC DEVICE HAVING FLEXIBLE MUTUAL CONNECTION BY DOUBLE-METAL DUPLEX-STUD STRUCTURE AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To enhance the resistance against metal migration, by providing the constitution wherein a mutual connecting part and a capacitor include a first metal layer, a dielectric layer, and a second metal layer, and the connecting part of the mutual connecting part to the first metal layer and the second metal 11 layer and the connecting part of the capacitor to the first metal layer and the second metal layer are further included. ;SOLUTION: The formation of metal studs 32, 33 and 34 is performed at the same time as the pattern formation of a dielectric substance between levels. Then, the metal studs 32 and 33 are connected to only one of layers 17 and 15, respectively, so as to obtain a precision metal-metal capacitor. The stud 32 is connected to only an upper plate 22 and arranged at an arbitrary point upper than the capacitor. The stud 33 should come into contact with only a lower capacitor plate 21 from the upper side. Therefore, the position of the stud 33 is important in comparison with the above described two capacitors. Furthermore, the metal stud 34 in correspondence with the end terminal of the mutual connecting part is in contact with both layers 24 and 25 of the mutual connecting part.;COPYRIGHT: (C)1998,JPO