PRODUCTION OF MASTERING MASTER DISK AND APPARATUS FOR PRODUCTION OF MASTERING MASTER DISK

摘要

PROBLEM TO BE SOLVED: To exactly control the width and depth of grooves by controlling development time for forming a photoresist layer on a glass master disk and forming groove regions on this photoresist layer by an exposing and developing stages to the photoresist layer. ;SOLUTION: The development monitor regions where a plurality of linear patterns are arranged at the pitch of twice the target width of the grooves are previously formed on the photoresist layer 2 and the diffracted secondary light D₂ by the linear patterns of the laser beam past these development monitor regions are detected by a photodiode. The light quantity of the diffracted secondary light D₂ when the width of the grooves formed according to the progression of the development along the linear patterns turns to 1/2 of the pitch turns to zero and, therefore, the development is stopped at this time.;COPYRIGHT: (C)1997,JPO