RECESSED PART RECORDING METHOD FOR OPTICAL MASTER DISK, PRODUCTION OF OPTICAL MASTER DISK, PRODUCTION OF OPTICAL DISK, OPTICAL DISK, AND LATENT IMAGE RECORDER FOR OPTICAL MASTER DISK

摘要

PURPOSE: To obtain a recessed part recording method capable of forming recessed parts which are of the same accuracy in their depth and width and are respectively different in the depths on a master disk and a process for producing the optical master disk. ;CONSTITUTION: A photoresist 5 is applied on a substrate 1. The part where the deep recessed part is to be formed, of the photoresist covering the region where reproduction-only region 2 is to be formed, is irradiated with a first light beam B1 and is exposed from the front surface of the photoresist 5 down to the substrate surface. The part where the shallow recessed part is to be formed, of the photoresist 5 covering the region where recording region 3 is to be formed is irradiated with the first light beam B1. The photoresist 5 is sensitized from the front surface of the photoresist down to the substrate surface and the entire part of the region where the recording region 3 is to be formed, is irradiated with a second light beam B2 to expose the parts nearer the front surface side than the parts of the thickness corresponding to the depth of the shallow recessed part from the substrate surface exclusive of the part of the thickness corresponding to the depth of the shallow recessed part. The photoresist is developed after the irradiation with the light beams, thereby, the optical master disk having two kinds of the recessed parts; the shallow recessed part and deep recessed part, is obtd.;COPYRIGHT: (C)1996,JPO