Synthesis method null of vapor phase modulo diamond

摘要

PURPOSE:To improve strength by vibrating a substrate at a specific frequency within a diamond forming region and depositing a high-strength diamond film on the substrate surface. CONSTITUTION:A tungsten filament 3 and a dish-like container 1 made of Mo, etc., are set in a reaction vessel and a substrate 4 made of Mo, etc., is attached to the bottom of the dish-like container 1. The distance from the filament 3 is 2-7mm and vibration at =1kHz is applied to vibrate the substrate 4 at 0.1-2mm amplitude. A carrier gas, such as H2, together with a raw material gas, such as ethyl alcohol, is introduced into the reaction vessel and reacted at about 2200 deg.C hot filament temperature under about 100Torr pressure in the reaction vessel for about 7hr to form a diamond thin film having about 35mum thickness on the substrate surface at about 650-1200 deg.C temperature.