METHOD FOR ADJUSTING LASER BEAM OR ELECTRON BEAM IRRADIATING POSITION, DUST PARTICLE DETECTOR, SCANNING ELECTRON MICROSCOPE AND DUST PARTICLE ANALYZER EMPLOYING LASER BEAM

摘要

PROBLEM TO BE SOLVED: To facilitate adjustment of the laser beam or electron beam irradiating position. ;SOLUTION: An XY stage 21 to be driven in XY direction is set with a plate 51 having a micro protrusion 51a. A laser light source 32 projecting a laser beam toward the XY stage 21 and a photodetector 33 for detecting the laser beam are arranged above the XY stage 21. The XY stage 21 is drivenon the basis of a position where the photodetector 33 detects the laser light projected from the laser light source 32 and scattered by the protrusion 51a.;COPYRIGHT: (C)1998,JPO